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Laser Driven Light Source

Laser Driven Light Source

The LDLS Product Range

Today’s Lamp Technologies

Limitations with Arc-Lamps

Arc-Lamps use electrodes to conduct electrical current through the gas heat the gas to high temperature
–The electrodes limit the temperature of the gas

Limited temperature leads to limited DUV
–The electrodes erode and shorten lamp lifetime
–Arc flicker reduces effective brightness and adds noise
Limitations with Deuterium Lamps
  • Limited wavelength range ~190nm – 400nm
  • Low brightness, relatively large plasma
  • Short life: 500-1000hrs to 50% output

Limitations with Tungsten-Halogen Lamps
  • Short lifetime, large filament area, low power <400 nm
  • Usually combined with Deuterium lamp to cover broad spectrum
–Gap in spectrum around 400nm
–Low brightness from 2 separate emitters
–Changing spectrum from 2 different lifetimes
Coupling Accessories
  • Designed to couple EQ-99 and EQ-1500 light into spectrometers or optical fibers
  • Off-Axis Parabolic (OAP) Mirror Assembly
  • Efficiently couple full wavelength range
  • Variety of focal length and NA options
  • Free beam or SMA fiber coupling options
  • Housings are Nitrogen purgeable
Broadband Fiber Collimators For LDLS
  • Designed to collimate EQ-99FC fiber output
  • Reflective Mirror Assembly
  • Efficiently collimate from 200 – 2400 nm
  • Two output beam sizes available; 6.7 mm and 11 mm diameter
  • SMA fiber connection
  • Low divergence (depends on fiber size)
Summary
  • Very high brightness across complete spectrum
            –170nm through visible and out to 2100 nm
            –Easy coupling to small fibers and spectrometer slits
            –Ease of collimation
  • Eliminates need for multiple lamps (replaces D2/Tungsten/Xenon Arc)
            –Simplified optical system
  • Excellent Spatial stability
            –Repeatable measurements
  • Superior short and long term power stability
            –Repeatable measurements
  • Electrodeless operation for long life
            –Reduced consumable costs
            –Minimal recalibration of instrument