UV Excimer CL 5000 laser series

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UV Excimer CL 5000 laser series (CL5100,CL5200,CL5300)

Description
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UV Excimer CL 5000 laser series (CL5100,CL5200,CL5300)

Optromix CL5000 is a compact and powerful excimer laser with wavelengths 193 nm, 248 nm and 308 nm. CL5000 is equipped with high voltage switch – a high resource cold cathode thyratron. The laser has an average power stabilization system and a computer control,which makes it easy and convenient to use.Moreover, CL5000 provides a longer lasting time for gas mixture. Excimer laser is a perfect source for ophthalmic system. It is also a great solution for various industrial purposes, namely manufacturing diffractive structures in optic fibers, micro marking, processing of certain materials and laser deposition.

Key features

● Compact excimer laser

● Metal ceramic design

● Long lifetime Thyratron switch

● Built-in Energy monitor

● Energy stabilization

● Air-cooled versions (CL-5100)

Applications

● Spectroscopy

● FBG writing

● Material processing

● Micromarking

● DUV Lithography

CL5000 series specification

Parameter	Value
Gas mixture	ArF	KrF	XeCl
Wavelength	193 nm	248 nm	308 nm
Nominal Pulse Energy	20 mJ	40 mJ	25 mJ
Average Power CL 5100 CL 5200 CL 5300	2 W 4 W 5 W	4 W 8 W 10 W	2.5 W 5 W 7 W
Max. repetition rate CL 5100 CL 5200 CL 5300	100 Hz 200 Hz 300 Hz
Pulse duration	810 ns	911 ns
Pulse energy stability	sigma < 2%
Beam size (V * H)	12 mm x 5 mm
Beam Divergence (V * H)	4 mrad x 2 mrad (stable resonator)
Time jitter	< 2 ns
Gas	1 premix cylinder
Cooling CL 5100 CL 5200/5300	air water < 1 liter/min
Control interface	RS232 (Windows)
Power consumption	220 240 V, 50 60 Hz, 1.5 kW
Dimensions (W x H x L)	330 x 550 x 780 mm
Weight	80 kg