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UV Excimer CL 7000 laser series

UV Excimer CL 7000 laser series

 UV Excimer CL 7000 laser series (CL7020,CL7050,CL7100)

UV Excimer CL 7000 laser series

Optromix InfraLight 7000 excimer laser 193, 248,308 nm has a high pulse energy, which allows successful performance of various applications.Its high tech metal ceramic design makes the laser unique and easy to utilize. Excimer laser is equipped with a long lifetime thyratron switch to manipulate voltage discharges. Builtin energy monitor allows the laser to perform on the stable energy level all the time, without any interruptions. Moreover, today Optromix is offering air cooled versions with the max repetition rate up to 20 Hz. InfraLight 7000 excimer laser is a perfect fit for scientific and industrial purposes. Spectroscopy, manufacturing diffractive diffractive structures in fibers, material processing and micro marking can be performed using our new laser systems.

Model

Max. repetition rate

CL ­7020

20 Hz

CL ­7050

50 Hz

CL ­7100

100 Hz

Key features

● High pulse energy

● Metal ceramic design

● Long lifetime Thyratron switch

● Built-in Energy monitor

● Energy stabilization

● Air-cooled versions up to 20 Hz

Applications

● Spectroscopy

● FBG writing

● Material processing

● Micromarking

● DUV Lithography

CL7000 series specification:

Parameter

Value

Gas mixture

ArF

KrF

XeCl

Wavelength

193 nm

248 nm

308 nm

Nominal Pulse Energy

250 mJ

400 mJ

300 mJ

Average Power         CL 7020
CL 7050
CL 7100

5 W
12 W
25 W

8 W
20 W
35 W

6 W
15 W
25 W

Max. repetition rate:  CL 7020
CL 7050
CL 7100

20 Hz
50 Hz
100 Hz

Pulse duration

17 ns

20 ns

Pulse energy stability

sigma < 2%

Beam size (V * H)

20 mm x 6 mm

21 mm x 6 mm

22 mm x 6 mm

Beam Divergence (V * H)

4.5 mrad x1.5 mrad (stable resonator)

Time jitter

< 2 ns

Gas

1 premix cylinder

Cooling                      CL 7020
CL 7050
CL 7100

air
water < 1 liter/min water < 3 liter/min

Control interface

RS­232 (Windows)

Power consumption   CL 7020
CL 7050
CL 7100

220 ­ 240 V, 50 ­ 60 Hz, 1.5 kW
220 ­ 240 V, 50 ­ 60 Hz, 1.8 kW
380/220 ­ 240 V, 50 ­ 60 Hz, 3.5 kW

Dimensions (W x H x L)

375 x 746 x 1360 mm

Weight

170 kg

Optromix provides 1 year warranty for all systems.

UV Excimer CL 7000 laser series (CL7020,CL7050,CL7100)

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