UV Excimer CL 7000 laser series
UV Excimer CL 7000 laser series
UV Excimer CL 7000 laser series (CL7020,CL7050,CL7100)
Optromix InfraLight 7000 excimer laser 193, 248,308 nm has a high pulse energy, which allows successful performance of various applications.Its high tech metal ceramic design makes the laser unique and easy to utilize. Excimer laser is equipped with a long lifetime thyratron switch to manipulate voltage discharges. Builtin energy monitor allows the laser to perform on the stable energy level all the time, without any interruptions. Moreover, today Optromix is offering air cooled versions with the max repetition rate up to 20 Hz. InfraLight 7000 excimer laser is a perfect fit for scientific and industrial purposes. Spectroscopy, manufacturing diffractive diffractive structures in fibers, material processing and micro marking can be performed using our new laser systems.
Model |
Max. repetition rate |
CL 7020 |
20 Hz |
CL 7050 |
50 Hz |
CL 7100 |
100 Hz |
Key features
● High pulse energy
● Metal ceramic design
● Long lifetime Thyratron switch
● Built-in Energy monitor
● Energy stabilization
● Air-cooled versions up to 20 Hz
Applications
● Spectroscopy
● FBG writing
● Material processing
● Micromarking
● DUV Lithography
CL7000 series specification:
Parameter |
Value |
||
Gas mixture |
ArF |
KrF |
XeCl |
Wavelength |
193 nm |
248 nm |
308 nm |
Nominal Pulse Energy |
250 mJ |
400 mJ |
300 mJ |
Average Power CL 7020 |
5 W |
8 W |
6 W |
Max. repetition rate: CL 7020 |
20 Hz |
||
Pulse duration |
17 ns |
20 ns |
|
Pulse energy stability |
sigma < 2% |
||
Beam size (V * H) |
20 mm x 6 mm |
21 mm x 6 mm |
22 mm x 6 mm |
Beam Divergence (V * H) |
4.5 mrad x1.5 mrad (stable resonator) |
||
Time jitter |
< 2 ns |
||
Gas |
1 premix cylinder |
||
Cooling CL 7020 |
air |
||
Control interface |
RS232 (Windows) |
||
Power consumption CL 7020 |
220 240 V, 50 60 Hz, 1.5 kW |
||
Dimensions (W x H x L) |
375 x 746 x 1360 mm |
||
Weight |
170 kg |
Optromix provides 1 year warranty for all systems.