UV Excimer CL 7000PLD laser series
UV Excimer CL 7000PLD laser series
UV Excimer CL 7000PLD laser series
Optromix CL 7000PLD is an excimer laser with 193 nm or 248 nm wavelengths. It has high pulse energy, up to 1 J, for material processing, medical and life science. It has stabilized energy output, which is achieved through energy stabilization system of the excimer laser. On top of that, CL 7000PLD has an extended lifetime, because of its metal ceramic design and thyratron switch. Built In energy monitor makes it easy and convenient to use. It is a highly effective light source, simple to install and operate. Short pulse length and high beam quality are great for UV manufacturing applications.
Key features
● High pulse energy up to 1 J
● Variable pulse duration 20-40 ns
● Metal ceramic design
● Long lifetime Thyratron switch
● Built-in Energy monitor
● Energy stabilization
Applications
● Spectroscopy
● Material processing
● Micromarking
● Laser spraying
● DUV Lithography
CL7000PLD series specification
Parameter |
Value |
|
Gas mixture |
ArF |
KrF |
Wavelength |
193 nm |
248 nm |
Nominal Pulse Energy |
500 mJ |
800 mJ |
Average Power at 20 Hz |
8 W |
15 W |
Max. repetition rate |
20 Hz or 50 Hz |
|
Pulse duration |
20 40 ns |
|
Pulse energy stability |
sigma < 2% |
|
Beam size (V * H) |
20 mm x 20 mm |
|
Beam Divergence (V * H) |
4.5 mrad x 1.5 mrad |
|
Time jitter |
< 2 ns |
|
Gas |
1 premix cylinder |
|
Cooling |
water < 3 liter/min |
|
Control interface |
RS232 (Windows) |
|
Power consumption |
380/220 240 V, 50 60 Hz, 7 kW |
|
Dimensions (W x H x L) |
800 x760 x 1810 mm |
|
Weight |
360 kg |