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UV Excimer CL 7000PLD laser series

UV Excimer CL 7000PLD laser series

UV Excimer CL 7000PLD laser series

UV Excimer CL 7000PLD laser series

Optromix CL 7000PLD is an excimer laser with 193 nm or 248 nm wavelengths. It has high pulse energy, up to 1 J, for material processing, medical and life science. It has stabilized energy output, which is achieved through energy stabilization system of the excimer laser. On top of that, CL 7000PLD has an extended lifetime, because of its metal ceramic design and thyratron switch. Built In energy monitor makes it easy and convenient to use. It is a highly effective light source, simple to install and operate. Short pulse length and high beam quality are great for UV manufacturing applications.

 

Key features

High pulse energy up to 1 J

Variable pulse duration 20-40 ns

Metal ceramic design

Long lifetime Thyratron switch

Built-in Energy monitor

Energy stabilization

Applications

Spectroscopy

Material processing

Micromarking

Laser spraying

DUV Lithography

CL7000PLD series specification

Parameter

Value

Gas mixture

ArF

KrF

Wavelength

193 nm

248 nm

Nominal Pulse Energy

500 mJ

800 mJ

Average Power at 20 Hz

8 W

15 W

Max. repetition rate

20 Hz or 50 Hz

Pulse duration

20 ­ 40 ns

Pulse energy stability

sigma < 2%

Beam size (V * H)

20 mm x 20 mm

Beam Divergence (V * H)

4.5 mrad x 1.5 mrad

Time jitter

< 2 ns

Gas

1 premix cylinder

Cooling

water < 3 liter/min

Control interface

RS­232 (Windows)

Power consumption

380/220 ­ 240 V, 50 ­ 60 Hz, 7 kW

Dimensions (W x H x L)

800 x760 x 1810 mm

Weight

360 kg

UV Excimer CL 7000PLD laser series

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