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UV Excimer CL 7000k laser series

UV Excimer CL 7000k laser series

 UV Excimer CL 7000k laser series

 UV Excimer CL 7000k laser series

Optromix CL7000k is excimer laser with 193 nm,248 nm or 308 nm wavelengths and max repetition rate of 1000 Hz. It has a high beam pointing stability, and on top of that Optromix can deliver the laser system in two different configurations, with a beam size of 16 mm x 5mm or 6 mm x 5 mm, depending on the client’s requirements. CL7000k has an outstanding energy stabilization properties, its pulse energy stability sigma is < 2%. Our excimer laser is a perfect fit for an industrial laser system to perform material processing,micro marking or laser spraying.

 UV Excimer CL 7000k laser series

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Key features

1000 Hz Excimer laser

High beam pointing stability

High pulse energy

Metal ceramic design

Long lifetime Thyratron switch

Built-in Energy monitor

Energy stabilization

Applications

Material processing

Micromarking

Laser spraying

DUV Lithography

CL7000k series specification:

Parameter

Value

Gas mixture

ArF

KrF

XeCl

Wavelength

193 nm

248 nm

308 nm

Nominal Pulse Energy

24 mJ

40 mJ

20 mJ

Average Output Power

20 W

35 W

18 W

Max. repetition rate

1000 Hz

Pulse duration

14 ns

20 ns

Pulse energy stability

sigma < 2%

Beam size (V * H)

16 mm x 5 mm (6 mm x 5 mm – optional)

Beam Divergence (V * H)

4.5 mrad x1.5 mrad (stable resonator)

Time jitter

< 2 ns

Gas

1 premix cylinder

Cooling

water < 3 liter/min

Control interface

RS­232 (Windows)

Power consumption

380/220 ­ 240 V, 50 ­ 60 Hz, 3.5 kW

Dimensions (W x H x L)

375 x 746 x 1360 mm

Weight

170 kg

 UV Excimer CL 7000k laser series

Optromix provides 1 year warranty for all systems.

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