UV Excimer CL 7000k laser series
UV Excimer CL 7000k laser series
UV Excimer CL 7000k laser series
Optromix CL7000k is excimer laser with 193 nm,248 nm or 308 nm wavelengths and max repetition rate of 1000 Hz. It has a high beam pointing stability, and on top of that Optromix can deliver the laser system in two different configurations, with a beam size of 16 mm x 5mm or 6 mm x 5 mm, depending on the client’s requirements. CL7000k has an outstanding energy stabilization properties, its pulse energy stability sigma is < 2%. Our excimer laser is a perfect fit for an industrial laser system to perform material processing,micro marking or laser spraying.
Key features
● 1000 Hz Excimer laser
● High beam pointing stability
● High pulse energy
● Metal ceramic design
● Long lifetime Thyratron switch
● Built-in Energy monitor
● Energy stabilization
Applications
● Material processing
● Micromarking
● Laser spraying
● DUV Lithography
CL7000k series specification:
Parameter |
Value |
||
Gas mixture |
ArF |
KrF |
XeCl |
Wavelength |
193 nm |
248 nm |
308 nm |
Nominal Pulse Energy |
24 mJ |
40 mJ |
20 mJ |
Average Output Power |
20 W |
35 W |
18 W |
Max. repetition rate |
1000 Hz |
||
Pulse duration |
14 ns |
20 ns |
|
Pulse energy stability |
sigma < 2% |
||
Beam size (V * H) |
16 mm x 5 mm (6 mm x 5 mm – optional) |
||
Beam Divergence (V * H) |
4.5 mrad x1.5 mrad (stable resonator) |
||
Time jitter |
< 2 ns |
||
Gas |
1 premix cylinder |
||
Cooling |
water < 3 liter/min |
||
Control interface |
RS232 (Windows) |
||
Power consumption |
380/220 240 V, 50 60 Hz, 3.5 kW |
||
Dimensions (W x H x L) |
375 x 746 x 1360 mm |
||
Weight |
170 kg |
Optromix provides 1 year warranty for all systems.