Categories

Contact US

Contact: wendy

Tel: +86-021-64306513

Fax: +86-021-64306513

Mobile: 13611848037

E-mail: sales@aoetech.com

Add: Room 328,Building 10,No.3599 Yuanjiang Road(Fawkes innovation garden,),MinHang District,Shanghai P.R.C (201109)

UV Excimer CL 7500 laser series

UV Excimer CL 7500 laser series

UV Excimer CL 7500 laser series

UV Excimer CL 7500 laser series

Optromix CL7500 is a narrow linewidth excimer laser with 193 nm and 248 nm wavelengths options. Our excimer laser has a special MOPA design, which means that its configuration includes master oscillator and power amplifier.Moreover, one of the key features of this laser is tunable wavelength, which enables excimer laser to perform outstandingly well certain applications. In particular, laserinduced fluorescence spectroscopy and processing material with high spatial resolution.

Key features

Narrow linewidth excimer laser

MOPA design - Master Oscillator &Power Amplifier

Wavelength tuning

Built-in Energy monitor

Energy stabilization

Applications

Spectroscopy

Material processing

Micromarking

Laser spraying

DUV Lithography

CL7500 series specification

Parameter

Value

Gas mixture

ArF

KrF

Wavelength

193 nm

248 nm

Nominal Pulse Energy

100 mJ

250 mJ

Linewidth

< 3 pm

Max. repetition rate       CL­7520
CL­7550

20 Hz
50 Hz

Pulse duration

20 ns

Pulse energy stability

sigma < 2%

Beam size (V * H)

20 mm x 6 mm

Beam Divergence (V * H)

< 0.2 mrad

Spatial coherence

> 5 mm

Temporal coherence

> 10 mm

Time jitter

< 2 ns

Gas

1 premix cylinder

Cooling

water < 3 liter/min

Control interface

RS­232 (Windows)

Power consumption

380/220 ­ 240 V, 50 ­ 60 Hz, 7 kW

Dimensions (W x H x L)

800 x760 x 1810 mm

Weight

200 kg

Warranty: 1 year

UV Excimer CL 7500 laser series

9 other products in the same category: