UV Excimer CL 7500 laser series
UV Excimer CL 7500 laser series
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UV Excimer CL 7500 laser series
Optromix CL7500 is a narrow linewidth excimer laser with 193 nm and 248 nm wavelengths options. Our excimer laser has a special MOPA design, which means that its configuration includes master oscillator and power amplifier.Moreover, one of the key features of this laser is tunable wavelength, which enables excimer laser to perform outstandingly well certain applications. In particular, laserinduced fluorescence spectroscopy and processing material with high spatial resolution.
Key features
● Narrow linewidth excimer laser
● MOPA design - Master Oscillator &Power Amplifier
● Wavelength tuning
● Built-in Energy monitor
● Energy stabilization
Applications
● Spectroscopy
● Material processing
● Micromarking
● Laser spraying
● DUV Lithography
CL7500 series specification
|
Parameter |
Value |
|
|
Gas mixture |
ArF |
KrF |
|
Wavelength |
193 nm |
248 nm |
|
Nominal Pulse Energy |
100 mJ |
250 mJ |
|
Linewidth |
< 3 pm |
|
|
Max. repetition rate CL7520 |
20 Hz |
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|
Pulse duration |
20 ns |
|
|
Pulse energy stability |
sigma < 2% |
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|
Beam size (V * H) |
20 mm x 6 mm |
|
|
Beam Divergence (V * H) |
< 0.2 mrad |
|
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Spatial coherence |
> 5 mm |
|
|
Temporal coherence |
> 10 mm |
|
|
Time jitter |
< 2 ns |
|
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Gas |
1 premix cylinder |
|
|
Cooling |
water < 3 liter/min |
|
|
Control interface |
RS232 (Windows) |
|
|
Power consumption |
380/220 240 V, 50 60 Hz, 7 kW |
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Dimensions (W x H x L) |
800 x760 x 1810 mm |
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Weight |
200 kg |
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Warranty: 1 year
