Spin-On Glass Coatings

• Applications
• Smoothing layer as a part of dielectric in multilevel metal process
• Protective coating
• Intermediate coating in trilayer resist process
• Properties
• Compatible with spin coating techniques
• Shelf-life exceeding 3 years at room temperature
• Good adhesion to polymers
• Lack of solubility in common solvents after curing at temperatures lower than 100°C
• Compatible with typical resist coating equipment and no need for SOG coaters
• Impact on productivity
• Elimination of CVD SiO2 in some applications
• Elimination of time consuming deposition and etchback of SiO2 to fill narrow tranches in multilevel metal process
• Elimination of polishing in preparation of substrates for thin film magnetic head fabrication