Categories

Spin-On Dopants

Spin-On Dopants

Spin-On Dopants

 

Spin-On Dopant Coatings
Coating
BDC1-2000
PDC1-2000
ZDPC2-2000
Type
Boron Dopant Coating
Phosphorus Dopant Coating
Zinc Dopant Coating

 

  • Applications
    • Spin-on boron source [a-Si, c-Si applications]
    • Spin-on phosphorus source [a-Si, c-Si applications]
    • Spin-on zinc source [III/V substrates]
  • Properties
    • Transparent film converted to solid-state dopant upon application of oxygen plasma
  • Impact on productivity
    • Elimination of doped spin-on glasses
    • Elimination of ion implantation in some applications
    • Elimination of zinc doping from ampoule

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